Overview

Analyzing Copper, Sulfuric acid, Chloride, Organics (Leveller, Brightener)

ancosys Cu-ancolyzer includes titration, UV-spectroscopy and CVS (Cyclic voltammetric spectroscopy) in order to analyse an electroless copper bath. It confirms consistent chemical conditions for each wafer.

The system allows to take samples from up to 4 slipstreams (additional as option) plus a manual sample. The analysis of each sample is executed simultaneously to optimize the analyzing time.

Total analytic time is 50 min per tank.

The open ancolyzer technology platform allows expanding the functionalities in analytics, replenishment and communication.

Analytics

• In up to 4 tanks, standard, hand sample
• Better than 2 % repeatability (Titration, spectrometry) and 5% (CVS)
• Modular design allowing expansion of analytics and replenishment
• Troubleshooting by Remote Administration to increase uptime
• Analytical methods available for all major bath suppliers
• Copper, Sulphuric acid, Chloride, Organics (Leveller, Brightener)
• Results are validated on plausibility to ensure reliability
• System is calibrated with standards
• Automatic sampling and rinsing methods

Software

• ancolyzer 3.x on Microsoft Windows or Linux
• All data stored in a database
• Reports and trendtable available to control analysis data
• UserManager to protect critical user interaction by defining security levels with multiple users. Each user can have individual log-on’s and passwords
• Protocol for logging user activities (Audit trail) and alarms (Alarm protocol)
• Analysis timing, frequency and sequence of analysis can be easily changed in the graphical user interface (GUI)